[20a-W611-1~12] 16.3 Bulk, thin-film and other silicon-based solar cells

[20a-W611-9] A study on the effects of the damage on the cross-sectional workfunction measurement of crystalline Si solar cells.

〇(PC)Fumihiko Yamada¹, Takefumi Kamioka¹, Yoshio Ohshita¹, Itaru Kamiya¹ (1.Toyota Tech. Inst.)

Keywords:Crystalline Si solar cells,AFM/KFM,Workfunction mapping

We measured the local workfunction of the interface between the surface layers on crystalline Si solar cell. In this paper, we discuss the sample preparation method. We employed the cleaving technique of substrate under liquid nitrogen condition. We discuss about the damage of the cleaved substrate which depends on the sample preparation condition.