The 63rd JSAP Spring Meeting, 2016

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[20p-H103-1~21] 6.2 Carbon-based thin films

Sun. Mar 20, 2016 1:15 PM - 7:00 PM H103 (H)

Masami Aono(National Defence Academy), Takako Nakamura(AIST), Atsuhito Sawabe(Aoyama Gakuin Univ.)

3:45 PM - 4:00 PM

[20p-H103-10] AE Technique to Evaluation for Adhesion Characteristics of DLC film

Tsuguyori Ohana1, Hiroki Mano1, Takako Nakamura2 (1.AMRI, AIST, 2.ACT, AIST)

Keywords:DLC film,Adhesion,AE Technique