The 63rd JSAP Spring Meeting, 2016

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[20p-H103-1~21] 6.2 Carbon-based thin films

Sun. Mar 20, 2016 1:15 PM - 7:00 PM H103 (H)

Masami Aono(National Defence Academy), Takako Nakamura(AIST), Atsuhito Sawabe(Aoyama Gakuin Univ.)

6:30 PM - 6:45 PM

△ [20p-H103-20] The effect of RF power on amorphous carbon nitride films prepared by sputtering and its photoinduced deformation

〇Tomo Harata1, Masami Aono1, Nobuaki Kitazawa1, Yoshihisa Watanabe1 (1.NDA)

Keywords:amorphous carbon nitride,photoinduced deformation,sputtering