[20p-H103-1~21] 6.2 Carbon-based thin films

△ [20p-H103-7] Quantitative analysis of sp³/(sp³+sp²) ratio in DLC films using NEXAFS and solid-state NMR

〇(D)XiaoLong Zhou¹, Sarayut Tunmee¹, Tsuneo Suzuki¹, Seiichi Kawahara¹, Kazuhiro Kanda², Pat Phothongkam³, Hideki Nakajima³, Keiji Komatsu¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech., 2.Univ. of Hyogo, 3.SLRI)

Keywords:DLC film,NEXAFS,solid-state NMR

The C-sp³ content is one of the most important parameters to classify the Diamond-like carbon films. The aim of this study is to evaluate the C-sp³ content of a-C:H films by using the near edge X-ray absorption fine structure (NEXAFS) and nuclear magnetic resonance (NMR) methods.