3:15 PM - 3:30 PM
[20p-H103-8] Technology of low temperature thermal CVD for amorphous carbon film
Keywords:semiconductor,Carbon
Presentation information
Oral presentation
6 Thin Films and Surfaces » 6.2 Carbon-based thin films
[20p-H103-1~21] 6.2 Carbon-based thin films
Sun. Mar 20, 2016 1:15 PM - 7:00 PM H103 (H)
Masami Aono(National Defence Academy), Takako Nakamura(AIST), Atsuhito Sawabe(Aoyama Gakuin Univ.)