The 63rd JSAP Spring Meeting, 2016

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Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[20p-H112-1~12] 15.5 Group IV crystals and alloys

Sun. Mar 20, 2016 1:15 PM - 4:30 PM H112 (H)

Keisuke Arimoto(Univ. of Yamanashi)

2:15 PM - 2:30 PM

△ [20p-H112-5] Evaluation of Anisotropic Stress State in Uniaxially Strained-Ge Fabricated by Selective Ion Implantation Technique

〇Shotaro Yamamoto1, Kazuma Takeuchi1, Daisuke Kosemura1, Shiori Konoshima2, Kentarou Sawano2, Atsushi Ogura1 (1.Meiji Univ., 2.Adv. Res. Lab., Tokyo City Univ.)

Keywords:strain,Ge,ion implantation