The 63rd JSAP Spring Meeting, 2016

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15 Crystal Engineering » 15.5 Group IV crystals and alloys

[20p-H112-1~12] 15.5 Group IV crystals and alloys

Sun. Mar 20, 2016 1:15 PM - 4:30 PM H112 (H)

Keisuke Arimoto(Univ. of Yamanashi)

2:45 PM - 3:00 PM

△ [20p-H112-6] Characterization of Local Strain in MOCVD-Ge1−xSnx/Ge Fin Structures by using Microdiffraction

〇Yuuki Inuzuka1, Shinichi Ike1,2, Tomoya Washizu1, Wakana Takeuchi1, Yosuke Shimura1, Yasuhiko Imai3, Shigeru Kimura3, Osamu Nakatsuka1, Shigeaki Zaima1,4 (1.Nagoya Univ., 2.JSPS Research Fellow, 3.JASRI, 4.IMaSS, Nagoya Univ.)

Keywords:GeSn,MOCVD,Strained Ge