The 63rd JSAP Spring Meeting, 2016

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Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[20p-H112-1~12] 15.5 Group IV crystals and alloys

Sun. Mar 20, 2016 1:15 PM - 4:30 PM H112 (H)

Keisuke Arimoto(Univ. of Yamanashi)

3:00 PM - 3:15 PM

[20p-H112-7] Tomographic mapping analysis of high Ge content SiGe films with compositionally graded layers by X-ray microdiffraction

〇Kazuki Shida1, Shotaro Takeuchi1, Yasuhiko Imai2, Shigeru Kimura2, Akira Sakai1 (1.Osaka Univ., 2.JASRI/SPring-8)

Keywords:SiGe,X-ray microdiffraction,compositionally graded layer