Surface Irradiation Effect by Ionic Liquid EMIM-BF<sub>4</sub> Ion Beams

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.5 Ion beams

Sun. Mar 20, 2016 1:15 PM - 5:15 PM H137 (H)

Masaki Tanemura(Nagoya Inst. of Tech.), Noriaki Toyoda(Univ. of Hyogo)

3:45 PM - 4:00 PM

〇(M1)Kazuya Nishi¹, Hiroki Ueda¹, Shiki Fuji¹, Mitsuaki Takeuchi¹, Hiromichi Ryuto¹, Gikan Takaoka¹ (1.Kyoto Univ.)

Keywords:SIMS,negative ion,metal free