Reactions between Nitrogen Molecules and Metal Cluster Ions<br />Formed by High Power Impulse Magnetron Sputtering

Kengo Akimoto; Isamu Mizuuchi; Hiroaki Yamamoto; Masahide Tona; Keizo Tsukamoto; Motoyoshi Nakano; Keijiro Ohshimo; Fuminori Misaizu

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.5 Ion beams

[20p-H137-1~15] 7.5 Ion beams

Sun. Mar 20, 2016 1:15 PM - 5:15 PM H137 (H)

Masaki Tanemura(Nagoya Inst. of Tech.), Noriaki Toyoda(Univ. of Hyogo)

1:45 PM - 2:00 PM

[20p-H137-3] Reactions between Nitrogen Molecules and Metal Cluster Ions
Formed by High Power Impulse Magnetron Sputtering

〇Kengo Akimoto¹, Isamu Mizuuchi¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto^1,2, Motoyoshi Nakano¹, Keijiro Ohshimo¹, Fuminori Misaizu¹ (1.Tohoku Univ., 2.Ayabo Corporation)

Keywords:metal cluster

« Previous in this session
Next in this session »

▲

Presentation information

[20p-H137-1~15] 7.5 Ion beams

[20p-H137-3] Reactions between Nitrogen Molecules and Metal Cluster IonsFormed by High Power Impulse Magnetron Sputtering

[20p-H137-3] Reactions between Nitrogen Molecules and Metal Cluster Ions
Formed by High Power Impulse Magnetron Sputtering