Development and Application of Ambient SIMS using MeV-energy Heavy Ion Beam

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.5 Ion beams

Sun. Mar 20, 2016 1:15 PM - 5:15 PM H137 (H)

Masaki Tanemura(Nagoya Inst. of Tech.), Noriaki Toyoda(Univ. of Hyogo)

2:30 PM - 2:45 PM

〇Masakazu Kusakari¹, Makiko Fujii¹, Toshio Seki¹, Takaaki Aoki¹, Jiro Matsuo¹ (1.Kyoto Univ.)

Keywords:MeV-energy heavy ion,SIMS,ambient analysis