Development of Cluster SIMS Analysis Technique under Low Vacuum

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.5 Ion beams

Sun. Mar 20, 2016 1:15 PM - 5:15 PM H137 (H)

Masaki Tanemura(Nagoya Inst. of Tech.), Noriaki Toyoda(Univ. of Hyogo)

2:45 PM - 3:00 PM

〇Kanji Suzuki¹, Masakazu Kusakari¹, Makiko Fujii¹, Toshio Seki¹, Takaaki Aoki¹, Jiro Matsuo¹ (1.Kyoto Univ.)

Keywords:SIMS,GCIB