[20p-P13-1~14] 13.2 Exploratory Materials, Physical Properties, Devices

[20p-P13-5] Syntheses of Si-based Nanostructures using calcium disilicide as templates by citric acid, malic acid and EDTA treatments

〇Yuki Kumazawa¹, Kenta Sasaki², Xiang Meng³, Yuan Peiling³, Hirokazu Tatsuoka² (1.Fac.Eng.,Shizuoka Univ., 2.Grad.Sch.Eng.,Shizuoka Univ., 3.GSST,Shizuoka Univ.)

Keywords:silicide,nanosheet,chelating agent