4:00 PM - 6:00 PM
[20p-P13-9] Investigation of impurity concentrations in β-FeSi2 films grown by sputtering method
Keywords:Silicide
Poster presentation
13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices
Sun. Mar 20, 2016 4:00 PM - 6:00 PM P13 (Gymnasium)
4:00 PM - 6:00 PM
Keywords:Silicide