Tetsu Hattori

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 4:00 PM - 6:00 PM P13 (Gymnasium)

Poster presentation
| 13 Semiconductors
| 13.2 Exploratory Materials, Physical Properties, Devices

[20p-P13-1~14] 13.2 Exploratory Materials, Physical Properties, Devices

4:00 PM - 6:00 PM

[20p-P13-9] Investigation of impurity concentrations in β-FeSi₂ films grown by sputtering method

〇Tetsu Hattori¹, Takahiko Higashi¹, Shuya Ikeda², Kazuya Ogi², Yoshikazu Terai^1,2 (1.Kagoshima Univ., 2.Kyushu Inst. of Tech.)