[20p-P8-1~6] 9.3 Nanoelectronics

△ [20p-P8-4] GaAs-based nanostructure formation by high-precision digital wet etching technique

〇Ryota Kuroda^1,2, Masaki Sato^1,2, Seiya Kasai^1,2 (1.RCIQE, 2.Hokkaido Univ.)

Keywords:GaAs,wet etching,nanowire