The 63rd JSAP Spring Meeting, 2016

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[20p-S221-1~17] 13.3 Insulator technology

Sun. Mar 20, 2016 1:45 PM - 6:15 PM S221 (S2)

Takanobu Watanabe(Waseda Univ.), Hiroshi Funakubo(Titech)

3:45 PM - 4:00 PM

[20p-S221-9] Consideration of Fabrication Method in ZrO2/Si Interface Layer

〇Yusuke Sugino1, Yoshitaka Iwazaki1, Tomo Ueno1 (1.Tokyo Univ of A & T)

Keywords:Ziruconia