The 63rd JSAP Spring Meeting, 2016

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Joint Session K » Joint Session K

[20p-S222-1~17] 21.1 Joint Session K

Sun. Mar 20, 2016 1:00 PM - 5:30 PM S222 (S2)

Naoki Ohashi(NIMS), Hisao Makino(Kochi Univ. of Tech.)

2:00 PM - 2:15 PM

[20p-S222-5] Study of stacked ZnO films for solid-phase crystallization by thermal annealing

〇Shoya Usui1, Akihiro Watanabe2, Hiroshi Chiba2, Tomoyuki Kawashima2, Katsuyoshi Washio2 (1.Tohoku Univ., 2.Tohoku University)

Keywords:Zinc Oxide,RF magnetron sputter,Vanadium