Electrical characterization of poly-InSb MOSFET for monolithic 3DIC

Presentation information

Oral presentation

13 Semiconductors » 13.5 Semiconductor devices and related technologies

Sun. Mar 20, 2016 1:45 PM - 6:30 PM S422 (S4)

Keiji Ikeda(TOSHIBA), Jiro Ida(Kanazawa Inst. of Tech.)

2:15 PM - 2:30 PM

〇(M1)Masahiro Takahashi^1,2, Sachie Fujikawa¹, Hiroki Fujishiro¹, Toshifumi Irisawa², Junji Tominaga², Tatsuro Maeda^1,2 (1.TUS, 2.AIST)

Keywords:semiconductor