Microwave Rapid Heating Used for Diffusing Impurities in Silicon

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

Sun. Mar 20, 2016 1:45 PM - 6:45 PM S423 (S4)

Seiichiro Higashi(Hiroshima Univ.), Akito Hara(Tohoku Gakuin Univ.)

4:45 PM - 5:00 PM

〇Kosuke Ota¹, Shunsuke Kimura¹, Masahiko Hasumi¹, Toshiyuki Sameshima¹, Ayuta Suzuki², Mitsuru Ushijima² (1.TUAT, 2.TEL)

Keywords:semiconductor,doping