The 63rd JSAP Spring Meeting, 2016

Akito Hara

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Chairperson, etc.

Sun. Mar 20, 2016 1:45 PM - 6:45 PM S423 (S4)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20p-S423-1~19] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

Seiichiro Higashi(Hiroshima Univ.), Akito Hara(Tohoku Gakuin Univ.)