Improvement of Yield in SOI Layer Transfer to PET substracte

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

Sun. Mar 20, 2016 1:45 PM - 6:45 PM S423 (S4)

Seiichiro Higashi(Hiroshima Univ.), Akito Hara(Tohoku Gakuin Univ.)

5:45 PM - 6:00 PM

〇Ryutatsu Mizukami¹, Akitoshi Nakagawa², Kazuki Hiramatsu², Shinji Takeshima², Tomonori Yamashita¹, Seiichiro Higashi² (1.Hiroshima Univ., 2.Adsm.)

Keywords:transfer