[20p-S611-1~17] 16.3 Bulk, thin-film and other silicon-based solar cells

[20p-S611-16] Fabrication of AlOx thin film by Spray Pyrolysis Coating
using the novel Aluminum Compound and its passivation property

〇Koichiro Inaba¹, Koji Toyota¹, Toshio Naka¹, Shinsuke Miyajima² (1.Tosoh Finechem, Ltd, 2.Dept. Physical Electronics, Tokyo Tech.)

Keywords:Crystal silicon,Passivation,Coat

Spray pyrolysis coating have much attention as an inexpensive coating method. In this study, The AlOx films on c-Si was fabricatede by spray pyrolysis coating with the novel compound we developed and the passivation property of that c-Si was evaluated.