[20p-W834-1~12] 11.5 Junction and circuit fabrication process, digital applications

[20p-W834-9] Self-alignment process of optical fiber to optical-to-electrical converter by using Si deep etching technique

〇Hirotaka Terai¹, Shigehito Miki¹, Taro Yamashita¹, Shigeyuki Miyajima¹ (1.NICT)

Keywords:superconducting nanowire,optical-to-electorical converter,fiber self-alignment

We investigate fiber alignment method to optical-to-electrical (O/E) converter integrated on Si wafer with single-flux-quantum (SFQ) circuit to realize multi-channel optical input to SFQ circuit. We report on the fiber self-alignment method to O/E converter on Si substrate based on Si deep etching technique.