9:00 AM - 9:15 AM
[21a-H103-1] Crystallization suppression of CeO2 thin films deposited by MOCVD by additional TEOS introduction
Keywords:dielectrics,MOCVD,CeO2
Oral presentation
6 Thin Films and Surfaces » 6.4 Thin films and New materials
Mon. Mar 21, 2016 9:00 AM - 11:45 AM H103 (H)
Motofumi Suzuki(Kyoto Univ)
9:00 AM - 9:15 AM
Keywords:dielectrics,MOCVD,CeO2