[21a-H103-1~10] 6.4 Thin films and New materials

△ [21a-H103-8] ITO/Ga₂O₃ multi-layer transparent electrodes for deep UV-LEDs

〇(M1)Natsuko Kuwabara¹, Toshiki Yasuda¹, Syota Katsuno¹, Norikatsu Koide¹, Tetsuya Takeuchi¹, Motoaki Iwaya¹, Satoshi Kamiyama¹, Isamu Akasaki^1,2 (1.Fac. Sci.&Eng., Meijo Univ., 2.Akasaki Research Center, Nagoya Univ.)

Keywords:deep UV-LEDs,transparent electrodes