[21a-H103-1~10] 6.4 Thin films and New materials

△ [21a-H103-7] In Situ Temperature Measurement of Crystallization Process of Tin Oxide Films in ELAMOD Process at Nano Second Time Scale

〇(M1)Tsukasa Katsuki¹, Tomohiko Nakajima², Tetsuo Tsuchiya², Atsushi Yumoto¹, Kentaro shinoda² (1.Shibaura Inst. Tech., 2.AIST)

Keywords:oxide,chemical solution deposition,excimer laser