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[21a-P6-1] Layer Characteristic Measurement of Dielectric Substrate Using THz-TDS Reflection Measurement
Keywords:terahertz wave,THz-TDS
Recent increase of the frequency band using in radio systems requires high manufacturing accuracy of radio equipment parts such as antennas. To increase the manufacturing accuracy of the parts, accurate and efficient nondestructive measurement of the material surface and inside characteristics using for the parts is demanded.
Terahertz Time Domain Spectroscopy (THz-TDS) has received much attention because terahertz waves are situated as an intermediate area between radio waves and light waves and they have distinctive reflection and transmission characteristics when illuminating the THz waves to materials. Thus, it is a promising method to accurately evaluate manufacturing accuracy of such material with nondestructive way.
This paper reports a reflection characteristic caused by the layer structure of a dielectric substrate, which is popularly used for print antennas, by using THz-TDS reflection measurement. The feature of the measurement method is using collimated THz wave. It can achieve efficient measurement when compared with using focused THz wave. The measurement result is compared with the microscopic image of the cross section of the dielectric substrate.
Terahertz Time Domain Spectroscopy (THz-TDS) has received much attention because terahertz waves are situated as an intermediate area between radio waves and light waves and they have distinctive reflection and transmission characteristics when illuminating the THz waves to materials. Thus, it is a promising method to accurately evaluate manufacturing accuracy of such material with nondestructive way.
This paper reports a reflection characteristic caused by the layer structure of a dielectric substrate, which is popularly used for print antennas, by using THz-TDS reflection measurement. The feature of the measurement method is using collimated THz wave. It can achieve efficient measurement when compared with using focused THz wave. The measurement result is compared with the microscopic image of the cross section of the dielectric substrate.