9:30 AM - 11:30 AM
[21a-P8-24] ITO sputtering damage to Cat-CVD amorphous silicon passivation films
Keywords:sputtering,catalytic chemical vapor deposition,solar cell
Poster presentation
16 Amorphous and Microcrystalline Materials » 16 Amorphous and Microcrystalline Materials(Poster)
Mon. Mar 21, 2016 9:30 AM - 11:30 AM P8 (Gymnasium)
9:30 AM - 11:30 AM
Keywords:sputtering,catalytic chemical vapor deposition,solar cell