9:30 AM - 11:30 AM
[21a-P8-3] Reduction of pulse light energy by using antireflection films in the crystallization of a-Si films by FLA
Keywords:flash lamp annealing,antireflection film
Poster presentation
16 Amorphous and Microcrystalline Materials » 16 Amorphous and Microcrystalline Materials(Poster)
Mon. Mar 21, 2016 9:30 AM - 11:30 AM P8 (Gymnasium)
9:30 AM - 11:30 AM
Keywords:flash lamp annealing,antireflection film