The 63rd JSAP Spring Meeting, 2016

Presentation information

Poster presentation

16 Amorphous and Microcrystalline Materials » 16 Amorphous and Microcrystalline Materials(Poster)

[21a-P8-1~27] 16 Amorphous and Microcrystalline Materials(Poster)

Mon. Mar 21, 2016 9:30 AM - 11:30 AM P8 (Gymnasium)

9:30 AM - 11:30 AM

[21a-P8-3] Reduction of pulse light energy by using antireflection films in the crystallization of a-Si films by FLA

Yuki Sonoda1, Keisuke Ohdaira1 (1.JAIST)

Keywords:flash lamp annealing,antireflection film