12:15 PM - 12:30 PM
△ [21a-S223-13] Investigation on ac Pseudo-MOSFET technique for SOI substrates
Keywords:pseudo-MOS,SOI substrate,ac signal analysis
It is always well known that the pseudo-MOS tecnique is applicable to the evaluation of the SOI substrate. However, the dc technique was only applied to the evaluation. In this paper, we challenged how the ac technique is powerful to extract some physical parameters of SOI substrates.
By assuming the equivalent circuit, we successfully extracted some parameters of the substrate.
By assuming the equivalent circuit, we successfully extracted some parameters of the substrate.