The 63rd JSAP Spring Meeting, 2016

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13 Semiconductors » 13.5 Semiconductor devices and related technologies

[21a-S422-1~10] 13.5 Semiconductor devices and related technologies

Mon. Mar 21, 2016 9:00 AM - 12:15 PM S422 (S4)

Ken Uchida(Keio Univ.), Tetsuo Endoh(Tohoku Univ.)

11:30 AM - 11:45 AM

▼ [21a-S422-8] Realization of Ge n- and p-MOSFETs by using low thermal budget ionimplantation after germanidation technique (< 400 °C)

〇(P)WENHSIN CHANG1, Hiroyuki Ota1, Tatsuro Maeda1 (1.AIST)

Keywords:Ge,MOSFET,CMOS