11:45 〜 12:00
▼ [21a-W241-12] Fabrication of L10-Mn1-xCoxAl Thin Films for Magnetic Tunnel Junctions
キーワード:Ordered alloys
Magnetic materials using the ferromagnetic layer in STT-MRAM are required a high magneto-crystalline anisotropy (Ku), a low gilbert damping constant (a) and a low saturation magnetization (Ms). We focus L10-MnAl alloy with a high Ku (1.5×107 erg/cc), a low a (0.006) and a small Ms (550 emu/cc). According to previous reports, (Mn-Co)-Al alloys with a few % Co atoms were easily crystalized to L10 structure in comparison with Mn-Al binary alloys. In this study, we have investigated the structural and magnetic properties in Mn1-xCoxAl thin films with various Co content (x) to apply them to ferromagnetic electrodes of MTJs.