The 63rd JSAP Spring Meeting, 2016

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Oral presentation

8 Plasma Electronics » 8.1 Plasma production and control

[21a-W611-1~11] 8.1 Plasma production and control

Mon. Mar 21, 2016 9:00 AM - 12:00 PM W611 (W6)

Naoki Shirai(Tokyo Metropolitan Univ.), Tatsuya Misawa(Saga Univ.)

11:30 AM - 11:45 AM

△ [21a-W611-10] Microwave Plasma Generation Using Cylindrical Cavity and Solid-State Amplifier Ⅱ

〇(M1)Yuichi Hasegawa1, Daisuke Ogawa1, Keiji Nakamura1, Soonam Park2, Satoru Kobayashi2, Hideo Sugai3 (1.Chubu Univ., 2.Applied Materials, 3.NISRI)

Keywords:Microwave Plasma,Cylindrical Cavity,Solid-State