Yuichi Hasegawa

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 9:00 AM - 12:00 PM W611 (W6)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and control

[21a-W611-1~11] 8.1 Plasma production and control

11:30 AM - 11:45 AM

△ [21a-W611-10] Microwave Plasma Generation Using Cylindrical Cavity and Solid-State Amplifier Ⅱ

〇(M1)Yuichi Hasegawa¹, Daisuke Ogawa¹, Keiji Nakamura¹, Soonam Park², Satoru Kobayashi², Hideo Sugai³ (1.Chubu Univ., 2.Applied Materials, 3.NISRI)