The 63rd JSAP Spring Meeting, 2016

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[21p-H137-1~22] 7.2 Applications and technologies of electron beams

Mon. Mar 21, 2016 1:15 PM - 7:00 PM H137 (H)

Yoichiro Neo(Shizuoka Univ.), Hitoshi Nakahara(Nagoya Univ.), Yasuhito Gotoh(Kyoto Univ.)

4:30 PM - 4:45 PM

△ [21p-H137-13] Development of Small-size SEM with a Single Carbon Nanotube Field Emitter

〇Shunya Oishi1, Shintaro Yamazaki1, Hitoshi Nakahara1, Hidekazu Murata2, Shigekazu Nagai3, Teruaki Ohno4, Koji Asaka1, Yahachi Saito1 (1.Nagoya Univ., 2.Meijo Univ., 3.Mie Univ., 4.Technex Lab Co.)

Keywords:carbon nanotube