Shunya Oishi

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:15 PM - 7:00 PM H137 (H)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[21p-H137-1~22] 7.2 Applications and technologies of electron beams

4:30 PM - 4:45 PM

△ [21p-H137-13] Development of Small-size SEM with a Single Carbon Nanotube Field Emitter

〇Shunya Oishi¹, Shintaro Yamazaki¹, Hitoshi Nakahara¹, Hidekazu Murata², Shigekazu Nagai³, Teruaki Ohno⁴, Koji Asaka¹, Yahachi Saito¹ (1.Nagoya Univ., 2.Meijo Univ., 3.Mie Univ., 4.Technex Lab Co.)

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