The 63rd JSAP Spring Meeting, 2016

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[21p-H137-1~22] 7.2 Applications and technologies of electron beams

Mon. Mar 21, 2016 1:15 PM - 7:00 PM H137 (H)

Yoichiro Neo(Shizuoka Univ.), Hitoshi Nakahara(Nagoya Univ.), Yasuhito Gotoh(Kyoto Univ.)

2:30 PM - 2:45 PM

[21p-H137-6] Electron beam induced etching of carbon nanotubes

Yuto Tomita1,2, 〇Hideto Yoshida1, Seiji Takeda1 (1.ISIR, Osaka Univ., 2.Osaka Univ.)

Keywords:carbon nanotube,electron beam induced etching,environmental transmission electron microscope