[21p-H137-1~22] 7.2 Applications and technologies of electron beams

[21p-H137-7] Observation of metal alloys using Fountain Detector

〇Takashi Sekiguchi¹, Takashi Kimura¹, Hideo Iwai¹ (1.NIMS)

Keywords:Fountain Detector,SEM,secondary electron

The energy filtered secondary electron (SE) images give fruitful information of the specimen, not only morphology and composition but also surface potential, electrical field etc. Such modern detector has been developed for inlens SEM and outlens detectors were abandoned. We have developed low-pass secondary electron detector (LPSED) for outlens SEM and named “Fountain Detector (FD)”. This detector is composed of bias grid above and electron detector below the specimen. The bias voltage and the geometry of the detector limit the energy and acceptance angle of SE, respectively. The biggest advantage of FD detector is that we can easily trace the trajectories of the secondary electros. The subtraction of the images taken different bias voltages gives the energy filtered images. In this presentation, we applied FD for the observation of metal alloys such as Cu-Al and Ag-Sn. The contrast change across the alloy phases and surface diffusion are observed.