1:30 PM - 3:30 PM
[21p-P11-5] First principles calculation on stability of gettering sites induced by C3H5 cluster ion implantations
Keywords:gettering,C3H5 cluster ion implantation,silicon
Poster presentation
15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects
Mon. Mar 21, 2016 1:30 PM - 3:30 PM P11 (Gymnasium)
1:30 PM - 3:30 PM
Keywords:gettering,C3H5 cluster ion implantation,silicon