[21p-P15-1~23] 3.8 Optical measurement, instrumentation, and sensor

[21p-P15-1] Error characteristics in optical wafer-thickness measurements using coupled analyses of geometrical optics and wave optics

〇Teppei Onuki¹, Hirotaka Ojima¹, Jun Shimizu¹, Zhou Libo¹ (1.Ibaraki Univ.)

Keywords:optical thickness gauge,Fabry-Perot interference,spectrometry

Error characteristics in optical wafer-thickness measurements are investigated by means of coupled analyses of geometrical optics and wave optics toward ensuring the measurement precision.