[21p-P15-1~23] 3.8 Optical measurement, instrumentation, and sensor

[21p-P15-12] Novel non-destructive thickness measurement method by a white light OCT with FDTD simulation for optical device fabrication

〇Tsuyoshi Nishi¹, Nobuhiko Ozaki¹, Yoichi Oikawa², Kunio Miyaji², Hirotaka Ohsato³, Eiichiro Watanabe³, Naoki Ikeda³, Yoshimasa Sugimoto³ (1.Wakayama Univ., 2.Think-Lands Co. Ltd., 3.NIMS)

Keywords:Optical Coherence Tomography,Semiconductor microfabrication,FDTD simulation