4:00 PM - 6:00 PM
△ [21p-P15-8] Fundamental study of dual-optical-comb spectroscopic ellipsometry
Keywords:Dual-optical-comb spectroscopy,Spectroscopic ellipsometry
Dual-optical-comb spectroscopy is a novel spectroscopic technique with the advantages of high spectral accuracy and resolution, and short measurement time. In this study, we propose a combination of the dual-optical-comb spectrometry and an ellipsometry, which we call “dual-optical-comb spectroscopic ellipsometry”. We realized ellipsometric evaluation of several materials with ultra-high spectral accuracy and resolution, and demonstrated efficacy and usefulness of the proposed system.