[21p-P15-1~23] 3.8 Optical measurement, instrumentation, and sensor

△ [21p-P15-8] Fundamental study of dual-optical-comb spectroscopic ellipsometry

〇Takeo Minamikawa^1,2, Yi-Da Hsieh^1,2, Kyuki Shibuya^1,2, Yoshiki Kaneohe¹, Sho Okubo^2,3, Hajime Inaba^2,3, Yasuhiro Mizutani^2,4, Takeshi Yaqui^1,2, Tetsuo Iwata^1,2 (1.Tokushima Univ., 2.JST-ERATO, 3.AIST, 4.Osaka Univ.)

Keywords:Dual-optical-comb spectroscopy,Spectroscopic ellipsometry

Dual-optical-comb spectroscopy is a novel spectroscopic technique with the advantages of high spectral accuracy and resolution, and short measurement time. In this study, we propose a combination of the dual-optical-comb spectrometry and an ellipsometry, which we call “dual-optical-comb spectroscopic ellipsometry”. We realized ellipsometric evaluation of several materials with ultra-high spectral accuracy and resolution, and demonstrated efficacy and usefulness of the proposed system.