[21p-P17-1~26] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[21p-P17-15] Fabrication of an optomechanical resonator with sub-wavelength hole array for the wavelength detection

Masataka Goto¹, Etsuo Maeda¹, 〇Reo Kometani¹ (1.Univ. of Tokyo)

Keywords:wavelength,nanomechanical resonaotor,NEMS

An optomechanical resonator with SiO₂/Ti/Au/Ti/SiO₂ sub-wavelength hole array was fabricated for the wavelength detection on the stabilization of laser, spectrometer and so on, and its detection characteristics for optical wavelength was evaluated. As a result, we found that the wavelength detection sensitivity in the wavelength range of 1547 nm-1563 nm was 9.13 pm.