4:00 PM - 6:00 PM
〇Hiroki Ohsawa1, Michihiro Nakano1, Hitoshi Suzuki1, Satoko Kuwano1, Akito Hara1 (1.Tohoku Gakuin Univ.)
Poster presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology
Mon. Mar 21, 2016 4:00 PM - 6:00 PM P17 (Gymnasium)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
4:00 PM - 6:00 PM
〇Hiroki Ohsawa1, Michihiro Nakano1, Hitoshi Suzuki1, Satoko Kuwano1, Akito Hara1 (1.Tohoku Gakuin Univ.)
4:00 PM - 6:00 PM
〇Shota Nibe1, Akito Hara1 (1.Tohoku Gakuin Univ.)
4:00 PM - 6:00 PM
〇Mitsuhisa Hiraiwa1, Tatsuaki Hirata1, NguyenThi Thuy1, Koji Kotani2, Shin-Ichiro Kuroki1 (1.Hiroshima Univ., 2.Touhoku Univ)
4:00 PM - 6:00 PM
〇Tatsuaki Hirata1, Nguyen Thuy1, Hiraiwa Mituhisa1, Kotani Kouji2, Kikkawa Takamaro1, Kuroki Shin-ichirou1 (1.Hiroshima Univ. RNBS, 2.Tohoku Univ.)
4:00 PM - 6:00 PM
〇(M2)Yuuki Yajima1, Kentaro Sawano1 (1.TokyoCityUniversity)
4:00 PM - 6:00 PM
〇(PC)Shintaro Otsuka1, Takahiro Mori1, Yukinori Morita1, Noriyuki Uchida1, Yongxun Liu1, Shinichi O'uchi1, Hiroshi Fuketa1, Shinji Migita1, Meisyoku Masahara1, Takashi Matsukawa1 (1.AIST)
4:00 PM - 6:00 PM
〇Masahiro Koike1,2, Koji Usuda1,2, Yoshiki Kamata1,2, Mori Takahiro2,3, Tatsuro Maeda2,3, Tsutomu Tezuka1,2 (1.Toshiba Corp., 2.GNC, AIST, 3.AIST)
4:00 PM - 6:00 PM
〇kazuki kamimura1, hiroki nakaie1, tetsuji arai1, chiaya yamamoto1, keisuke arimoto1, junji yamanaka1, kiyokazu nakagawa1, toshiyuki takamatsu2 (1.Univ. of Yamanashi, 2.SST Inc.)
4:00 PM - 6:00 PM
〇Katsuya Furuna1, Jianbo Liang1, Moeko Matsubara2, Yoshitaka Nishio2, Naoteru Shigekawa1 (1.Osaka City Univ., 2.Toyo Aluminium K.K.)
4:00 PM - 6:00 PM
〇Hiroyuki Koide1, Hao Wang1, Daisuke Ando1, Yuji Sutou1, Junichi Koike1 (1.Tohoku Univ.)
4:00 PM - 6:00 PM
〇HIDEKI HIRANO1, KOUSUKE HIKICHI2, SHUJI TANAKA1 (1.Tohoku Univ., 2.Technofine)
4:00 PM - 6:00 PM
〇Naoya Watanabe1, Masahiro Aoyagi1, Tsubasa Bandoh2, Takahiko Mitsui2, Eiichi Yamamoto2 (1.AIST, 2.Okamoto Machine Tool Works)
4:00 PM - 6:00 PM
〇Takafumi Kuboyama1, Yousuke Takagawa1, Ogawa Shimpei2, Fujisawa Daisuke2, Kimata Masafumi1 (1.Ritsumeikan Univ., 2.Mitsubishi Electric Corp.)
4:00 PM - 6:00 PM
〇Takafumi Kuboyama1, Yousuke Takagawa1, Shinpei Ogawa2, Daisuke Fujisawa2, Sinichi Yasui2, Masafumi Kimata1 (1.Ritsumeikan Univ/, 2.Mitsubishi Electric Corp.)
4:00 PM - 6:00 PM
Masataka Goto1, Etsuo Maeda1, 〇Reo Kometani1 (1.Univ. of Tokyo)
4:00 PM - 6:00 PM
Makie Terazawa1, Momoko Karita1, Shinya Kumagai1, 〇Minoru Sasaki1 (1.Toyota Technol. Inst.)
4:00 PM - 6:00 PM
〇Toshifumi Konishi1, Daisuke Yamane2,4, Teruaki Safu1, Hiroshi Toshiyoshi3,4, Masato Sone2,4, Kazuya Masu2,4, Katsuyuki Machida1,2,4 (1.NTT-AT, 2.Tokyo Tech., 3.Univ. of Tokyo, 4.JST-CREST)
4:00 PM - 6:00 PM
〇Daisuke Yamane1,4, Toshifumi Konishi2, Hiroyuki Ito1,4, Hiroshi Toshiyoshi3,4, Kazuya Masu1,4, Katsuyuki Machida1,2,4 (1.Tokyo Tech., 2.NTT-AT, 3.The Univ. of Tokyo, 4.JST-CREST)
4:00 PM - 6:00 PM
〇Minami Teranishi1,2, Tso-Fu Mark Chang1,2, Chun-Yi Chen1,2, Toshifumi Konishi3, Katsuyuki Machida1,2,3, Hiroshi Toshiyoshi2,4, Daisuke Yamane1,2, Kazuya Masu1,2, Masato Sone1,2 (1.Tokyo Institute of Technology, 2.JST-CREST, 3.NTT AT Corp., 4.The University of Tokyo)
4:00 PM - 6:00 PM
〇(D)Haochun Tang1, Chun-Yi Chen1,2, Tso-Fu Mark Chang1,2, Katsuyuki Machida1,2,3, Daisuke Yamane1,2, Kazuya Masu1,2, Masato Sone1,2 (1.P&I Lab. Tokyo Tech, 2.CREST JST, 3.NTT AT Corp.)
4:00 PM - 6:00 PM
〇Yota Ishizuka1,2, Sari Yanagida1,2, Tso-Fu Mark Chang1,2, Chun-Yi Chen1,2, Toshihumi Konishi3, Katsuyuki Machida1,2,3, Hiroshi Toshiyoshi1,4, Daisuke Yamane1,2, Kazuya Masu1,2, Masato Sone1,2 (1.Tokyo Inst., 2.JST-CREST, 3.NTT AT, 4.Tokyo Univ.)
4:00 PM - 6:00 PM
〇BoLun Zheng1, Takashi Nagoshi1,2, Tso-Fu Mark Chang1, Hideki Hosoda1, Tatsuo Sato1, Masato Sone1 (1.Tokyo Tech., 2.AIST)
4:00 PM - 6:00 PM
〇Keisuke Asano1,2, Hao-Chun Tang1,2, Chun-Yi Chen1,2, Tso-Fu Mark Chang1,2, Daisuke Yamane1,2, Katsuyuki Machida1,2,3, Kazuya Masu1,2, Masato Sone1,2 (1.CREST, 2.Titech, 3.NTTAT)
4:00 PM - 6:00 PM
〇(M1)Sari Yanagida1,2, Akiyoshi Araki1, Tso-Fu Mark Chang1,2, Chun-Yi Chen1,2, Takashi Nagoshi3, Equo Kobayashi1, Hideki Hosoda1, Tatsuo Sato1, Masato Sone1,2 (1.Tokyo Tech, 2.CREST, 3.AIST)
4:00 PM - 6:00 PM
〇Masaharu Yoshiba1,2, Chun-Yi Chen1,2, Tso-Fu Mark Chang1,2, Daisuke Yamane1,2, Katsuyuki Machida1,2,3, Kazuya Masu1,2, Masato Sone1,2 (1.CREST, 2.P and I Lab,Titech, 3.NTTAT)
4:00 PM - 6:00 PM
〇Akihira Miyachi1, Makoto Matsunoshita1, Ryoko Kishikawa2,3, Satoshi Yoshida4, Makoto Kasu5, Masahiro Horibe3, Kenjiro Nishikawa4, Iwamuro Mitsunori6, Shigeo Kawasaki1,2 (1.ISAS,JAXA, 2.Sokendai, 3.AIST, 4.Kagosima Univ, 5.Saga Univ, 6.Hitachi Chem. Co.,Ltd.)
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