[21p-P17-1~26] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[21p-P17-18] A Study on CMOS-MEMS Accelerometer for Sub-1G Detection

〇Daisuke Yamane^1,4, Toshifumi Konishi², Hiroyuki Ito^1,4, Hiroshi Toshiyoshi^3,4, Kazuya Masu^1,4, Katsuyuki Machida^1,2,4 (1.Tokyo Tech., 2.NTT-AT, 3.The Univ. of Tokyo, 4.JST-CREST)

Keywords:CMOS-MEMS,accelerometer,sub-1G