[21p-P2-1~7] 3.13 Semiconductor optical devices

[21p-P2-3] Intermixing of Highly-stacked Quantum Dots Structure by Ion Implantation

〇(B)Shine Matsui¹, Yuki Takei¹, Atsushi Matsumoto², Koichi Akahane², Yuichi Matsushima³, Hiroshi Ishikawa¹, Katsuyuki Utaka¹ (1.Waseda Univ., 2.NICT, 3.Waseda Univ. GCS)

Keywords:intermixing,quantum dot