[21p-P2-1~7] 3.13 Semiconductor optical devices

[21p-P2-4] Application of Highly-Stacked Quantum Dot Intermixed Materialsby Ion-Implantation and Annealing Technique to Photonic Integrated Devices

〇Yuki Takei¹, Shine Matsui¹, Atsushi Matsumoto², Kouichi Akahane², Yuichi Matsushima³, Hiroshi Ishikawa¹, Katsuyuki Utaka¹ (1.Waseda Univ., 2.NICT, 3.GCS)

Keywords:quantum dot,intermixing